Wherever possible, the book citations below reflect the specific editions used in the course.
Textbooks
Recommended
Plummer, James, Michael Deal, and Peter Griffin. Silicon VLSI Technology: Fundamentals, Practice, and Modeling. Upper Saddle River, NJ: Prentice Hall, 2000. ISBN: 9780130850379.
Laboratory Manual (available to students enrolled in the course)
Additional References
Campbell, Stephen. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York, NY: Oxford University Press, 2001. ISBN: 9780195136050.
Wolf, Stanley, and Richard Tauber. Silicon Processing for the VLSI Era. Vol. 1. Sunset Beach, CA: Lattice Press, 1986. ISBN: 9780961672133.
Sze, Simon. VLSI Technology. 2nd ed. New York, NY: McGraw-Hill, 1988. ISBN: 9780070627352.
Ghandi, Sorab. VLSI Fabrication Principles: Silicon and Gallium Arsenide. 2nd ed. New York, NY: Wiley-Interscience, 1994. ISBN: 9780471580058.
Pierret, Robert, and Gerold Neudeck. Modular Series on Solid State Devices. Reading, MA: Addison-Wesley, 1982. ISBN: 9780201052879.
Grove, A. S. Physics and Technology of Semiconductor Devices. New York, NY: Wiley, 1967. ISBN: 9780471329985.
Colclaser, R. A. Microelectronics Processing and Device Design. New York, NY: Wiley, 1980. ISBN: 9780471043393.
Vossen, John, and Werner Kern. Thin Film Processes. Burlington, MA: Academic Press, 1978. ISBN: 9780127282503.
Mayer, James, and Sylvanus Lau. Electronic Materials Science: For Integrated Circuits in Si and GaAs. Upper Saddle River, NJ: Prentice Hall, 1989. ISBN: 9780023781407.
Murarka, Shyam, and Martin Peckerar. Electronic Materials: Science and Technology. Burlington, MA: Academic Press, 1989. ISBN: 9780125111201.
Ohring, Milton. The Materials Science of Thin Films. 2nd ed. Burlington, MA: Academic Press, 2001. ISBN: 9780125249751.
Senturia, Stephen. Microsystem Design. New York, NY: Springer-Verlag, 2004. ISBN: 9780792372462.
Madou, Marc. Fundamentals of Microfabrication: The Science of Miniaturization. 2nd ed. Boca Raton, FL: CRC Press, 2002. ISBN: 9780849308260.
Kovacs, Gregory. Micromachined Transducers Sourcebook. New York, NY: McGraw-Hill, 1998. ISBN: 9780072907223.
May, G. S., and S. Sze. Fundamentals of Semiconductor Fabrication. New York, NY: John Wiley & Sons, Inc., 2003. ISBN: 9780471232797.
Smith, D. L. Thin Film Deposition: Principles and Practice. New York, NY: McGraw-Hill, 1995. ISBN: 9780070585027.
Writing References
Gopen, and Swan. "The Science of Scientific Writing." American Scientist 78 (Nov-Dec 1990): 550-558.
Perleman, Leslie, and Edward Barrett. The Mayfield Handbook of Technical & Scientific Writing. New York, NY: McGraw Hill, 1997. ISBN: 9781559346474.
Other Resources
Journals
IEEE Transactions on Electron Devices
IEEE Electron Device Letters
Journal of Applied Physics
Applied Physics Letters
Journal of the Electrochemical Society
Journal of Crystal Growth
Journal of Electronic Materials
IEEE Journal of Microelectromechanical Systems
Lab on a Chip
IOP Journal of Microengineering